UHV Sputtering System

Automated UHV-Sputtering System for 6” and 8” inch wafers

UHV Sputtering system with analytics

Automated UHV-Sputtering System for 2” samples with Analytics System

4" UHV Sputtering and evaporation System

UHV-Sputtering, E- beam & thermal evaporation system for max. 3" inch substrates

3" and 4" UHV Confocal Sputtering System

Automated UHV-Sputtering and ALD System for max. 4 inch substrates

Ionbeam UHV Sputter-Tool

Ionbeam sputter-tool for the deposition of clusters


Conferences 2018

Bestec supports the following conferences:

SRI 2018 Taipei, Taiwan

MEDSI 2018 Paris, France

Plasma Surface Engineering 2018 Garmisch Patenkirchen, Germany

Tenth Joint BER II and BESSY II Berlin, Germany